15
  • Hall 9 / Booth Number 9-632a
Alumina Ceramic Microporous Vacuum Chuck ¦ Semiconductor Wafer & Chip Handling Component
Key Facts
  • Ultra-precise dimensional tolerance
  • Customized material and structural design
  • High wear and corrosion resistance with long service life
Categories
Containment Filter systems for clean rooms

Product information

This high-performance alumina ceramic microporous vacuum chuck is engineered for secure, damage-free handling of semiconductor wafers and chips in ultra-clean manufacturing environments. Its porous ceramic structure delivers uniform vacuum distribution, ensuring stable, flat clamping of thin, fragile wafers without causing deformation or contamination.

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